The equipment is used to automatically supply special chemical products (such as TicI4, TEOS, TEB, TEPO, TDMAT, 4MS Etc). It can monitor the real-time supply pressure changes, save data, chemical usage, remaining quantity, etc. It can start the pipeline purging process before removing the chemical cylinder with one button (with pre-programmed PLC macros). It has a save and replace type TANK (BULK TANK) Chemical supply tank (PROCESS TANK).

1. With OPERATION MENU program that can be set according to the actual situation of the user

2. PURGE can selectively use HEATING function

3. Automatic HE GAS pressure adjustment solution

4. Independent OUTLET PURGE function, AUTO PURGE CYCLE available

5. PLC (Omron NJ) BASE CONTROLLER

6. Safety Part Enhancement (Spill, Smoke, UV/IR, High Temp) Leakage, Smoke, Spark, High Temperature

7. Add P-N2 Purge Line to increase Purge effect

8. Avoid Fume when performing Tank Change due to increasing Vacuum Gauge